CyberOptics Showcases All-in-One Relative Humidity, Leveling and Vibration Measurement Sensor for Reticle Environments at SPIE

CyberOptics^® Corporation, a leading global developer and manufacturer of high precision 3D sensing technology solutions, announces it will demonstrate its ReticleSense^® Auto Multi Sensor™ (AMSR) – the world’s most efficient and effective wireless measurement devices for semiconductor fabs and equipment OEMs at the SPIE PhotoMask Technology and EUV Lithography conference, September 17-20 at the Monterey Conference Center in California in booth #104.

ReticleSense Auto Multi Sensors (AMSR) measure leveling, vibration, and relative humidity (RH) in an all-in-one wireless real-time device.  The AMSR speeds equipment qualification, shortens equipment maintenance cycles and lowers equipment maintenance expenses. Multiple measurements can be captured and monitored in all locations of the reticle environment, saving equipment engineers or process engineers’ time and expense.

CyberOptics will also demonstrate the ReticleSense Airborne Particle Sensor (APSRQ) that speeds equipment set-up and long-term yields in semiconductor fabs by wirelessly monitoring airborne particles in real-time. Engineers can save time by swiftly locating contamination sources and see the effect of cleanings, adjustments and repairs.