Oxygen Measurements in Ultra-High Purity Gases for Semiconductor Fabrication

Analytical Industries Inc (AII) is renowned for its cost-effective and simple to use galvanic electrochemical oxygen analyzers and sensors. Control of oxygen as a contaminant in the ultra-high purity inert gases used in semiconductor processes, such as chemical vapor deposition, is vital to ensure high yields of wafers.

The company will be exhibiting at Semicon West, along with sister companies in the Process Sensing Technologies (PST). PST is a group of manufacturers who together provide an unmatched suite of instruments, analysers and sensors for precision measurements in industrial process control and environmental monitoring.

For cost-effective measurements of trace oxygen down to parts per trillion, the PI2-UHP oxygen analyzer for ultra-high purity gases uses Analytical Industries’ innovative Pico-Ion electrochemical oxygen sensor. With no messy electrolyte to top up, coupled with an average sensor lifespan of 12 months, the PI2-UHP requires minimal maintenance and is simple to use.

Visit AII at Semicon West, San Francisco on booth #5480 from July 9-11.