Apr 2 2010
Stable MEMS pressure sensor designer Acuity is offering 50 and 100 mbar full-scale ranges of the company’s low-pressure sensor die belonging to the AC3030 series.
Pin-out of Acuity AC3030 Low-Pressure Die
This introduction comes as an addition to its already existing 20 mbar full-scale range sensor die. Both process and structural improvements in the design of the AC3030 offer better stability when compared to conventional low-pressure parts. The new devices are designed in the same manner as the 20 mbar one.
Vice President at Acuity Henry Allen opined that the tight parameter distribution and low zero-drift of the AC3030 series chips have been well received by the customers of the company. The device facilitates precise measurements at low pressure.
The very low-mass diaphragm of the device helps overcome vibration errors and g-force, thereby offering higher accuracy and eliminating the correction schemes-related costs. The very small footprint of the device reduces chip costs and package stress effects.
President at Acuity Jim Knutti stated that the product finds applications in low-pressure instrumentation in industrial measurement, HVAC, and medical markets.
The wafers of the AC3030 are manufactured under an agreement with Semefab, an MEMS foundry.