May 13 2010
Acuity, a fabless vendor of high performance stable MEMS pressure sensors, has begun shipping its AC3050-010, an extremely stable low pressure sensor having a full scale rating of 10mbar.
Acuity semifab MEMS foundry
The AC3050-010 sensor has expanded the low pressure end of the company’s piezoresistive sensor portfolio to now offer 10 mbar full scale rated product. It complements the company’s AC3030 series 20 to full scale 100 mbar MEMS pressure sensor range. This sensor targets the low pressure instrumentation field in HVAC, medical and industrial measurement applications.
The structure of this sensor depends on several major steps. Its wafers are fabricated through a production agreement with Semefab, a MEMS foundry. Measuring a mere 1.9 mm square, its stability and sensitivity are far better when compared to much bigger customary low pressure sensor dies.
Salient features of the sensor include miniature 1.9 mm square footprint and very low-mass diaphragm. The diaphragm overcomes errors due to vibration and g-force resulting in enhanced accuracy and also lowers expenses related to correction schemes. The product’s small footprint reduces chip costs and package stress effects.
Acuity’s President Jim Knutti informed that the sensor design’s real strength is demonstrated by the ability and accuracy achieved by his company through utilizing one sensor chip for building amplifier parts at the 2.5 mbar full scale. He added that OEM customers will find the sensor useful for new applications needing extremely accurate low pressure measurements and replace current piezoresistive pressure sensor die.
Acuity’s Vice President Henry Allen informed that customers are very happy with the tight parameter distribution and low zero drift features of the company’s AC3030 silicon pressure series range in use earlier. He revealed that the new chip was developed based on direct response to demand from customers for similar cost benefits and stability provided in AC3030 parts, but at lower pressures. He added that the AC3050 chips have been able to leverage the process and structural enhancements of the AC3030 range for delivering improved stability as compared to customary low pressure type of piezoresistive sensor components.