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CyberOptics to Supply 3D Sensor Subsystems for KLA-Tencor BEOL Package Inspection Systems

CyberOptics, a leader in 3D optical sensing technology, has qualified as a supplier to KLA-Tencor, and has entered into a mutually exclusive agreement to supply 3D sensor subsystems for KLA-Tencor BEOL package inspection systems.

The agreement leverages CyberOptics ongoing R&D efforts into 3D sensing with KLA-Tencor’s industry leading systems design, applications expertise, and customer service.

“As we looked to continue to expand our product portfolio further into 3D inspection, we analyzed a number of potential technologies and concluded that the CyberOptics Multiple-Reflection Suppression (MRS) technology has the most potential to meet our needs,” commented Rod Smith, Director, Technology Sourcing at KLA-Tencor. “By partnering with CyberOptics, we are able to improve our time to market and supply more compelling system solutions to our customers.”

“We are delighted to have won the approval of a technology leader such as KLA-Tencor to use CyberOptics’ technology and to enter into a long-term agreement with them,” said Dr. Subodh Kulkarni, CEO of CyberOptics. He added, “This further validates our belief that CyberOptics’ technology and IP can be deployed in many markets as best-in-class.”

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